Advanced Control Techniques for Semiconductor and Flat Panel Display Substrate Handling Robots
نویسندگان
چکیده
Substrate-handling robots for semiconductor and flat-panel-display manufacturing applications possess undesirable structural flexibilities and frictional effects which erode closed-loop stability and deteriorate tracking performance. In this study, advanced control and identification techniques are applied to cope with these control challenges. The techniques include sensorless modal stabilization, observer-corrector control strategy, iterative learning control approach and neural-network-based perturbation estimation. The fundamentals of the techniques are reviewed and the resulting performance improvements are demonstrated experimentally.
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